• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The invention relates to an apparatus comprising a nozzle head (20) having a first end (21), a second end (22), a first side end (23), a second side end (24) and an output face (25) formed as a curved output face having a curvature axis (C). The nozzle head (20) comprises two or more precursor nozzles (26), a supporting structure (31, 32) and a fixing arrangement (51, 52). The fixing arrangement (51, 52) comprises one first fixing part (51) arranged between the first end (21) of the nozzle head (20) and the supporting structure (31, 32) and one second fixing part (52) arranged between the second end (22) of the nozzle head (20) and the supporting structure (31, 32), the one first fixing part (51) and the one second fixing part (52) are arranged on a support axis (S) parallel to the curvature axis (C).
    公开号:FI20175920A1
    申请号:FI20175920
    申请日:2017-10-18
    公开日:2019-04-19
    发明作者:Pekka Soininen；Mika Jauhiainen
    申请人:Beneq Oy；
    IPC主号:
    专利说明:

    Apparatus
    FIELD OF THE INVENTION
    The present invention relates to an apparatus for processing a surface of a substrate by subjecting the surface of the substrate to successive surface 5 reactions of at least two precursors according to the principles of atomic layer deposition (ALD), and more particularly to an apparatus according to the preamble of claim 1.
    BACKGROUND OF THE INVENTION
    In ALD applications, a surface of a substrate is typically subjected 10 successively to at least two gaseous precursors. The gaseous precursors effectively react with the substrate surface, resulting in deposition of a single atomic layer. The precursor stages are typically followed or separated by a purge stage that eliminates the excess precursor from the surface of the substrate prior to the separate introduction of the other precursor. Therefore, an ALD process requires 15 alternating in sequence the flux of precursors to the surface of the substrate. This repeated sequence of alternating surface reactions and purge stages between is a typical ALD deposition cycle.
    Prior art ALD apparatuses usually comprise a nozzle head having one or more precursor nozzles for subjecting the surface of the substrate to precursors. 20 The nozzle head is moved in relation to the substrate over the surface of the substrate and it will produce growth layers according to the principles of ALD method. The nozzle head is usually supported in relation to the surface of the substrate such that there is a predetermined distance between the nozzle head and the surface of the substrate. The substrate is supported to a substrate support such 25 that the mentioned predetermined distance is formed. As only one atomic layer is produced on the surface of the substrate during one ALD-cycle, the nozzle head may comprise several precursor nozzles such that a single scan with the nozzle head over the surface of the substrate forms several atomic layers on the surface of the substrate. The single scan with the nozzle head may be done by moving 30 either the nozzle head or the substrate such that the nozzle head and the substrate are moved in relation to each other. The predetermined distance between the nozzle head and the surface of the substrate is formed as small as possible such that the supply of the precursor materials on the surface of the substrate may be efficiently controlled and precursor materials do not escape to surroundings of the 35 nozzle head and a good coating may be formed on the surface of the substrate. The
    20175920 prh 18-10-2017 predetermined distance, or process gap, between the nozzle head and the surface of substrate may be for example 0.3-2 mm, preferably 0.5-1,0 mm.
    In prior art ALD applications the process temperature is usually between 70°C and 150°C. The nozzle head and the other parts of the apparatus 5 undergo thermal expansion due to the elevated process temperature. Usually several materials are used for constructing the ALD apparatus and different parts of the apparatus maybe at different temperature during processing and especially during heating and cooling stages of the apparatus. Therefore, the process gap between the nozzle head and the surface of the substrate may change causing 10 uncontrollable increase or decrease of the process gap. Excessive increase of the process gap leads to operational problems of the apparatus when it is used for coating a substrate. The decrease of the process gap may lead to a contact between nozzle head and the surface of the substrate preventing the operation of the apparatus. When cylindrical substrate support is used the thermal expansion in 15 radial direction may be 1 to 4 mm with a cylinder having radius 0,6m - 1,2 m. This means that the thermal expansion may be larger than the height of the process gap.
    One of the problems associated with the prior art is that when the process temperature is increased above 150°C there will occur operational problems because of thermal expansion of the apparatus which the thermal 20 expansion can be different in different parts of the apparatus. The increase in the process temperature will lead to transformations and deformations of the apparatus because of forces that will twist the apparatus and because there will be temperature differences due to geometrical and size factors.
    BRIEF DESCRIPTION OF THE INVENTION
    The objects of the invention are achieved by an apparatus which is characterized by what is stated in the independent claim 1. The preferred embodiments of the invention are disclosed in the dependent claims.
    The invention is based on the idea of providing a connection between the nozzle head and a supporting structure that supports the nozzle head in a 3 0 reaction chamber such that the thermal expansion of the apparatus is controlled so that operational problems caused by the increased process temperature can be prevented.
    An apparatus according to the invention comprises a nozzle head, a supporting structure and a fixing arrangement. The nozzle head has a first end and 35 a second end on opposing side of the nozzle head, a first side end and a second side
    20175920 prh 18-10-2017 end on opposing side of the nozzle head. The nozzle head further has an output face via which the at least one precursor is supplied. The output face is formed as a curved output face having a curvature axis extending parallel to the output face between the first end and the second end. The term curved output face having the 5 curvature axis comprises also an embodiment in which the curved output face is formed from a slightly angular bending such that the output face is substantially curved. In other words, the output face is the surface of the nozzle head which is towards the substrate to be coated. The nozzle head further comprises two or more precursor nozzles provided in connection with the output face and extending 10 between the first end and the second end for subjecting the surface of the substrate to at least one precursor.
    The nozzle head is in a preferred embodiment of the invention arranged in connection with a transport cylinder which guides the substrate to be coated. The curved output face of the nozzle head is formed to conform at least a portion 15 of a cylindrical outer surface of a transport cylinder. The nozzle head is supported by a supporting structure.
    The apparatus comprises a fixing arrangement for connecting the supporting structure and the nozzle head. The fixing arrangement comprises one first fixing part arranged between the first end of the nozzle head and the 20 supporting structure and one second fixing part arranged between the second end of the nozzle head and the supporting structure. The one first fixing part and the one second fixing part are arranged on a support axis parallel to the curvature axis of the nozzle head.
    The one first fixing part in the first end of the nozzle head and the one 25 second fixing part in the second end of the nozzle head means that there is one single fixing part connecting the first end of the nozzle head to the supporting structure and one single fixing part connecting the second end of the nozzle head to the supporting structure in a direction transverse to the direction of the support axis. In other words, it means that the ends of the nozzle head comprise only one 30 fixing point for connecting the nozzle head to the supporting structure but there may be multiple fixing parts in the direction of the support axis, i.e. successively, such that there successive first fixing parts and successive second fixing parts but they are arranged on the same support axis.
    In a preferred embodiment of the invention the one first fixing part is 3 5 connected to the first end of the nozzle head halfway between the first side end and the second side end and the one second fixing part is connected to the second end
    20175920 prh 18-10-2017 of the nozzle head halfway between the first side end and the second side end on the opposing side of the nozzle head such that the support axis divides the nozzle head into two halves.
    In one preferred embodiment of the invention the nozzle head is arranged to be movable in relation to the supporting structure, furthermore the nozzle head is arranged to be moved in an oscillating swing movement between a first end position and a second end position around the curvature axis of the curved output face. The nozzle head is arranged to be moved in a direction transverse to the curvature axis of the output face of the nozzle head. The apparatus therefore 10 comprises a moving mechanism for moving the nozzle head in the oscillating swing movement. As the nozzle head is movable in relation to the supporting structure the apparatus further comprises at least one bearing arrangement arranged between the nozzle head and the supporting structure for allowing the nozzle head to move in relation to the supporting structure. The bearing arrangement 15 comprises a support bearing part connected to the supporting structure and a nozzle bearing part connected to the nozzle head. The support bearing part of the supporting structure and the nozzle bearing part of the nozzle head connect the nozzle head and the supporting structure together forming a bearing connection.
    When the apparatus comprises the bearing arrangement the one first 20 fixing part is arranged between the first end of the nozzle head and the bearing arrangement and the one second fixing part is arranged between the second end of the nozzle head and the bearing arrangement.
    The at least one bearing arrangement comprises a support bearing part and a nozzle bearing part. The support bearing part is connected to the supporting 25 structure and said nozzle bearing part is connected to the nozzle head through the fixing arrangement.
    The apparatus comprises a first bearing arrangement arranged between the first end of the nozzle head and the supporting structure, and a second bearing arrangement arranged between the second end of the nozzle head and the 30 supporting structure. The bearing arrangement can be a roller bearing arrangement in which the support bearing part comprises bearing rollers and the nozzle bearing part comprises a bearing rail; or the support bearing part comprises a bearing rail and the nozzle bearing part comprises bearing rollers. Alternatively, the bearing arrangement can be a plain bearing arrangement in which the support 35 bearing part comprises a first bearing surface and the nozzle bearing part comprises a second bearing surface. The support bearing part and/or the nozzle
    20175920 prh 18-10-2017 bearing part preferably have the same curvature axis as the output face of the nozzle head
    In a preferable embodiment of the invention the first fixing part and/or the second fixing part comprises at least one thermal insulation borehole. The 5 apparatus further comprises a reaction chamber in which at least the nozzle head, the supporting structure and the fixing arrangement are arranged, said reaction chamber comprises at least one side wall and a bottom.
    The supporting structure comprises a first support part and a second support part. The first support part and/or the second support part is provided in 10 the at least one side wall; or the first support part and/or the second support part is provided in the bottom of the reaction chamber; or the first support part is provided in the at least one side wall and the second support part is provided in the bottom of the reaction chamber. Alternatively, the supporting structure comprises a first support part and a second support part, the at least one side wall 15 is arranged to form the first support part and/or the second support part; or the bottom of the reaction chamber is arranged to form the first support part and/or the second support part; or the at least one side wall and the bottom of the reaction chamber are arranged to form the first support part and the second support part.
    A first nozzle bearing part, the first fixing part, the nozzle head, the 20 second fixing part and a second nozzle bearing part are arranged successively along the support axis. Along the support axis from the first nozzle bearing part to the second nozzle bearing part there is always only one material when the apparatus is examined in the direction perpendicular to the support axis so that the thermal expansion can occur in the direction perpendicular to the support axis, 25 i.e. transverse in relation to the support axis.
    The apparatus further comprises a transport cylinder having a cylindrical outer surface and a central axis. The output face of the nozzle head is arranged to face toward the cylindrical outer surface of the transport cylinder.
    The apparatus according to the invention is operable in ALD applications in which the process temperature is above 150°C and even above 250°C or even 350°C.
    An advantage of the invention is that when the nozzle head is operated in high temperatures such as temperatures between 200°C and 400°C the thermal expansion occurs in the direction of the support axis in which the thermal 35 expansion of the apparatus is controllable without affecting to the ALD application process. In addition to the thermal expansion also thermal contraction occurs
    20175920 prh 18-10-2017 which has an effect to the tensions in the apparatus such that the size or the shape of different part may not remain the same. I.e. the changes in temperature of the apparatus expand or contract the materials such that when the apparatus is heated to the process temperature different parts possibly having different materials 5 expand and when the apparatus is cooled down the parts contract. As the nozzle head is connected to the supporting structure through a fixing arrangement which comprises one fixing part on one side of the nozzle head and another fixing part on the opposite side of the nozzle head and the fixing parts are arranged on a support axis which is parallel to the curvature axis of the output face of the nozzle head, 10 then the nozzle head is supported only through one support axis which means that the nozzle head can expand due to high temperatures freely and symmetrically to both transverse directions away from the support axis.
    BRIEF DESCRIPTION OF THE DRAWINGS
    The invention is described in detail by means of specific embodiments 15 with reference to the enclosed drawings, in which
    Figure 1 shows the apparatus according to the invention from a top perspective;
    Figure 2 shows the apparatus according to the invention from side; and
    Figure 3 shows the apparatus according to the invention from another 20 side.
    DETAILED DESCRIPTION OF THE INVENTION
    Figure 1 shows the apparatus according to the invention shown from a top perspective such that the output face 25 of the nozzle head 20 is shown. The nozzle head 20 comprises a first end 21, a second end 22, a first side end 23, a 25 second side end 24 and an output face 25 via which the at least one precursor is supplied. The nozzle head 20 is arranged inside a reaction chamber 1 and such that the output face 25 is toward a top of the reaction chamber 1. The apparatus further comprises a transport cylinder (not shown in figure 1 for the sake of clarity) for transporting a substrate along a transport path. Precursors are supplied to the 30 substrate in an area between an outer surface of the transport cylinder and the output face 25 ofthe nozzle head 20. As the transport cylinder, either being a whole cylinder or just a cut-out of a cylinder, comprises a cylindrical outer surface, the output face 25 of the nozzle head 20 preferably has the same curvature as the transport cylinder so that a gap between the output face 25 of the nozzle head 20 35 and the transport surface of the transport cylinder or the surface of the substrate
    20175920 prh 18-10-2017 has the same size throughout the area of the output face 25. Therefore a curvature axis C of the output face 25 is preferably the same as the axis of the transport cylinder. The nozzle head 2 0 comprises two or more precursor nozzles 2 6 provided in connection with the output face 25 and extending between the first end 21 and 5 the second end 22 for subjecting the surface of the substrate to at least one precursor. As can be seen from the figure 1 the first end 21 and the second end 22 are opposite to each other and the precursor nozzles 26 extend in a longitudinal direction between said firstand second ends 21,22. The nozzle head 20 is arranged to move in a direction which is transverse to the axis S shown in figure 1.
    The apparatus further comprises a supporting structure 31, 32 for supporting the nozzle head 20 and at least one bearing arrangement 41, 42, 43, 44 arranged between the nozzle head 20 and the supporting structure 31, 32 for allowing the nozzle head 20 to move in relation to the supporting structure 31, 32.
    A fixing arrangement 51, 52 for connecting a bearing arrangement 41,
    42, 43, 44 to the nozzle head 20 comprises one first fixing part 51 arranged between the first end 21 of the nozzle head 2 0 and the bearing arrangement 41, 43 and one second fixing part 52 arranged between the second end 22 of the nozzle head 20 and the bearing arrangement 42, 44. The first fixing part 51 and the second fixing part 52 are arranged on a support axis S parallel to the curvature axis C (not 20 shown in figure 1) of the nozzle head 20. Figure 1 further shows that the first fixing part 51 is connected to the first end 21 of the nozzle head 20 halfway between the first side end 23 and the second side end 24 and the second fixing part 52 is connected to the second end 2 2 of the nozzle head 2 0 halfway between the first side end 23 and the second side end 24 on the opposing side of the nozzle head 20 25 such that the support axis S divides the nozzle head 20 into two halves.
    The bearing arrangement 41, 42, 43, 44 allows the nozzle head 20 to move in relation to the supporting structure 31, 32. The apparatus further comprises a moving mechanism for allowing the nozzle head to move. The movement of the nozzle head is a swinging or a pendulum movement in the 30 direction transverse to the support axis S. The moving mechanism 70 can be for example a belt type moving mechanism as shown in figure 2 or a pendulum type moving mechanism.
    The bearing arrangement 41, 42, 43, 44 comprises a support bearing part 41, 42 and a nozzle bearing part 43, 44. The support bearing part 41, 42 is 35 connected to the supporting structure 31, 32 and the nozzle bearing part 43, 44 is connected to the nozzle head 20 through the fixing arrangement 51, 52. The
    20175920 prh 18-10-2017 support bearing part 41, 42 of the supporting structure 31, 32 and the nozzle bearing part 43, 44 of the nozzle head 20 connect the nozzle head 20 and the supporting structure 31, 32 together forming a bearing connection. In other words, the nozzle head 20 comprises the fixing arrangement 51, 52 and at least one nozzle bearing part 41. In a preferred embodiment of the invention the nozzle head 20 comprises a first fixing part 51, a second fixing part 5 2 and two nozzle bearing parts such that one nozzle bearing part 41 is connected to the first end 21 of the nozzle head 20 through the first fixing part 51 and another nozzle bearing part 41 is connected to the second end 2 2 of the nozzle head 2 0 through the second fixing part 52 in the opposite side of the nozzle head 20. In this kind of embodiment, the supporting structure 31, 32 also comprises two support bearing parts 42. In the embodiment of the invention shown in figure 1 the bearing arrangement 41,42 is a roller bearing arrangement in which the nozzle bearing part 43, 44 is a bearing rail and the support bearing part 41, 42 comprises bearing rollers. The bearing rail 15 and the bearing rollers can be arranged also such that the support bearing part 41, comprises the bearing rail and the nozzle bearing part comprises the bearing rollers. The bearing arrangement 41, 42, 43, 44 can also be a plain bearing arrangement in which the support bearing part 41, 42 comprises a first bearing surface and the nozzle bearing part 43, 44 comprises a second bearing surface.
    The supporting structure 31, 32 shown in figure 1 comprises a first support part 31 and a second support part 32, and the first support part 31 is connected to a side wall 2 of the reaction chamber 1 and the second support part 32 is connected to a bottom 3 of the reaction chamber 1. The reaction chamber 1 can form a vacuum chamber. The apparatus may comprise a vacuum pump or 25 another vacuum device connected to the reaction chamber 1 for providing vacuum inside the reaction chamber 1.
    As can be seen from figure 1 the first nozzle bearing part 43, the first fixing part 51, the nozzle head 20, the second fixing part 52 and a second nozzle bearing part 44 are arranged successively along the support axis S. The nozzle head 30 20 of the invention is operable in a process temperature above 150°C and even above 250°C or even 350°C and thermal expansion plays an important role in high temperatures, the nozzle head 20 comprising the first nozzle bearing part 43, the first fixing part 51, the nozzle head 20, the second fixing part 52 and the second nozzle bearing part 44 comprises only one material in the direction perpendicular 35 to the support axis S along the support axis S from the first nozzle bearing part 43 to the second nozzle bearing part 44.
    20175920 prh 18-10-2017
    Figure 2 shows the apparatus according to the invention as seen from side of the apparatus. In this figure, the transport cylinder 10 is also shown. The transport cylinder 10 has a cylindrical outer surface 11 and a central axis C. The output face 25 of the nozzle head 20 is arranged to face toward the cylindrical outer surface 11 of the transport cylinder 10. The transport cylinder 10 has a circular or cylindrical outer surface 11 and the transport cylinder 10 may be stationary or alternatively it may rotate around the central axis C of the transport cylinder 10. A substrate 15 is transported along a transport path such that the substrate 15 is transported along at least a part of the outer surface 11 of the transport cylinder 10 10. In figure 2 the substrate 15 is supplied from a first substrate roll 16 to the transport cylinder 10 and further to a second substrate roll 17. The firstand second substrate roll 16, 17 may also be replaced by some other kind of receptacle for supplying, receiving and storing elongated substrate 15. The apparatus can alternatively be one part of a production line. The first and second substrate roll 15 16, 17 are preferably rotated around their central axels, respectively, for transporting the elongated substrate 15 from the first substrate roll 16 to the second substrate roll 17 via the transport cylinder 10. The outer surface 11 of the transport cylinder 10 forms a substrate support surface on which the substrate 15 is supported during processing. The output face 25 of the nozzle head 20 and the 20 outer surface 11 of the transport cylinder 10 preferably have substantially same shape. The nozzle head 20 is positioned such that there is gap between the output face 25 of the nozzle head 20 and the outer surface 11 of the transport cylinder 10, or the surface of the substrate 15. The elongated substrate 15 is arranged to be transported in this gap between the output face 25 and the outer surface 11, such 25 that a predetermined process gap or distance is formed between the nozzle head
    20, or the output face 25, and the surface of the substrate 15. The output face 25 of the nozzle head 20 is positioned at a substantially constant distance from the outer surface 11 of the transport cylinder 10, or the surface of the substrate 15 on the outer surface 11 of the transport cylinder 10. This is achieved such that the 30 transport cylinder 10 has a first radius and the output face 25 of the nozzle head has a second radius larger than the first radius, and they have a common central axis C, which is named as a curvature axis C. Thus, the output face 25 of the nozzle head 20 and the outer surface 11 of the transport cylinder 10 are arranged coaxially for providing a substantially constant predetermined distance between 35 the outer surface 11 and the output face 25. In other words, the output face 25 is formed as a curved output face having a curvature axis C extending parallel to the
    20175920 prh 18-10-2017 output face 25 between the first end 21 and the second end 22.
    Figure 2 shows that the nozzle head 20 is provided with a moving mechanism 70 which can be a belt type moving mechanism providing a pendulum movement to the nozzle head 20. The nozzle head 20 is supported by the 5 supporting structure 32 which comprises a first support part 31 (not shown in the figure) and a second support part 32. The nozzle head 20 shown in figure 2 is shown such that the second end 2 2 of the nozzle head 2 0 is shown. The second support part 32 is provided in the bottom 3 of the reaction chamber 1 and the first support part 31 which is not shown in figure 2 can be provided in the side wall 2 10 or in the bottom 3 of the reaction chamber 1 or the side wall 2 may form the first support part 31 such that the bearing arrangement is provided to the side wall 2 of the reaction chamber 1.
    The bearing connection between the nozzle head 20 and the supporting structure 31, 32 is formed by a first bearing arrangement 41, 42, 43, 44 arranged 15 between the first end 21 of the nozzle head 2 0 and the supporting structure 31,32, and a second bearing arrangement 41,42, 43,44 arranged between the second end 22 of the nozzle head 20 and the supporting structure 31, 32. The figure 2 shows the second bearing arrangement which is arranged between the second end 22 of the nozzle head and the supporting structure 32. The bearing arrangement is a 20 roller bearing arrangement in which the support bearing part 41, 42 comprises bearing rollers and the nozzle bearing part 43, 44 comprises a bearing rail. The nozzle bearing part 43, 44 being the bearing rail preferably has the same curvature axis C as the output face 25 of the nozzle head 20. The apparatus may further comprise a heating device 80 for heating the nozzle bearing part 43, 44 so that the 25 thermal conditions can be better controlled when the nozzle head is operated for example in temperature such as 300°C or 350°C. The heating device 80 can be arranged in connection with the supporting structure.
    Figure 3 shows the apparatus according to the invention as seen from the second side end 24 of the nozzle head 20. The first support part 31 is the side 30 wall 2 of the reaction chamber 1 and the second support part 32 is provided in the bottom 3 of the reaction chamber 1. The nozzle head 20 is connected to the supporting structure 31, 32 through the bearing arrangement 40 forming the bearing connection. The bearing connection is formed by the first support bearing part 41 and the first nozzle bearing part 43 in the side of the first end 21 of the 35 nozzle head 20 and by the second support bearing part 42 and the second nozzle bearing part 44 in the side of the second end 22 of the nozzle head 20. The first nozzle bearing part 43 and the second nozzle bearing part 44 are connected to the nozzle head through the fixing arrangement 51, 52 such that the first nozzle bearing part 43 is connected to the first fixing part 51 which is connected to the first side 21 of the nozzle head 20 and the second nozzle bearing part 44 is connected to the second fixing part 52 which is connected to the second side 22 of the nozzle head 20. The first fixing part 51 and the second fixing part 52 are arranged on the same axis called the support axis S such that fixing parts 51, 52 are provided on the side ends 21, 22 of the nozzle head 20 in the middle of the side ends 21, 22 between the first side end 23 and the second side end 24. The first 10 fixing part 51 and/or the second fixing part 52 preferably comprises at least one thermal insulation borehole or other insulation. The support axis S is in the direction parallel with the curvature axis C which are in a substantially horizontal direction as showed in figure 3.
    The invention has been described above with reference to the examples 15 shown in the figures. However, the invention is in no way restricted to the above examples but may vary within the scope of the claims.
    权利要求:
    Claims (16)
    [1] 1. An apparatus for processing a surface of a substrate by subjecting the surface of the substrate to successive surface reactions of at least two precursors according to the principles of atomic layer deposition (ALD), the apparatus
    5 comprising:
    a nozzle head (20) having a first end (21), a second end (22), a first side end (23), a second side end (24) and an output face (2 5) via which the at least one precursor is supplied, said output face (25) is formed as a curved output face having a curvature axis (C) extending parallel to the output face (25) between the 10 first end (21) and the second end (22), the nozzle head (20) further comprises two or more precursor nozzles (26) provided in connection with the output face (25) and extending between the first end (21) and the second end (22) for subjecting the surface of the substrate to at least one precursor;
    a supporting structure (31, 32) for supporting the nozzle head (20); and
    15 characterized in that the apparatus further comprises a fixing arrangement (51, 52) for connecting the supporting structure (31, 32) and the nozzle head (20), the fixing arrangement (51, 52) comprises one first fixing part (51) arranged between the first end (21) of the nozzle head (20) and the supporting structure (31, 32) and one second fixing part (52) arranged between
    20 the second end (22) ofthe nozzle head (20) and the supporting structure (31, 32), the one first fixing part (51) and the one second fixing part (52) are arranged on a support axis (S) parallel to the curvature axis (C) ofthe nozzle head (20).
    [2] 2. An apparatus according to claim 1, characterized in that the
    25 apparatus further comprises at least one bearing arrangement (41, 42, 43, 44) arranged between the nozzle head (20) and the supporting structure (31, 32) for allowing the nozzle head (20) to move in relation to the supporting structure (31, 32).
    [3] 3. An apparatus according to claim 2, characterized in that the
    30 one first fixing part (51) is arranged between the first end (21) ofthe nozzle head (20) and the bearing arrangement (41, 42, 43, 44) and the one second fixing part (52) is arranged between the second end (22) of the nozzle head (20) and the bearing arrangement (41, 42, 43, 44).
    35
    [4] 4. An apparatus according to any previous claim, characterized in that the one first fixing part (51) is connected to the first end (21) of the nozzle
    20175920 prh 18-10-2017 head (20) halfway between the first side end (23) and the second side end (24) and the one second fixing part (52) is connected to the second end (22) ofthe nozzle head (20) halfway between the first side end (23) and the second side end (24) on the opposing side of the nozzle head (20) such that the support axis (S) divides the 5 nozzle head (20) into two halves.
    [5] 5. An apparatus according to any of claims 2-4, characterized in that the at least one bearing arrangement (41, 42, 43, 44) comprises a support bearing part (41, 42) and a nozzle bearing part (43, 44), said support bearing part
    10 (41, 42) is connected to the supporting structure (31, 32) and said nozzle bearing part (43, 44) is connected to the nozzle head (20) through the fixing arrangement (51,52).
    [6] 6. An apparatus according to any previous claim, characterized
    15 in that the apparatus comprises a first bearing arrangement (41, 43) arranged between the first end (21) ofthe nozzle head (20) and the supporting structure (31, 32), and a second bearing arrangement (42, 44) arranged between the second end (22) ofthe nozzle head (20) and the supporting structure (31, 32).
    20
    [7] 7. An apparatus according to claim 5 or 6, characterized in that the bearing arrangement (41, 42, 43, 44) is a roller bearing arrangement in which the support bearing part (41, 42) comprises bearing rollers and the nozzle bearing part (43, 44) comprises a bearing rail; or the support bearing part (41, 42) comprises a bearing rail and the 25 nozzle bearing part (43, 44) comprises bearing rollers.
    [8] 8. An apparatus according to claim 5 or 6, characterized in that the bearing arrangement (41, 42, 43, 44) is a plain bearing arrangement in which the support bearing part (41, 42) comprises a first bearing surface and 30 the nozzle bearing part (43, 44) comprises a second bearing surface.
    [9] 9. An apparatus according to any of claims 5-8, characterized in that the support bearing part (41, 42) and/or the nozzle bearing part (43, 44) having the same curvature axis (C) as the output face (24) ofthe nozzle head (20).
    [10] 10. An apparatus according to any previous claim,
    20175920 prh 18-10-2017 characterized in that the first fixing part (51) and/or the second fixing part (52) comprises at least one thermal insulation borehole.
    [11] 11. An apparatus according to any previous claim,
    5 characterized in that the apparatus further comprises a reaction chamber (1) in which at least the nozzle head (20), the supporting structure (31, 32) and the fixing arrangement (51, 52) are arranged, said reaction chamber (1) comprises at least one side wall and a bottom.
    10
    [12] 12. An apparatus according to claim 11, characterized in that the supporting structure (31, 32) comprises a first support part (31) and a second support part (32), the first support part (31) and/or the second support part (32) is provided in the at least one side wall (2); or
    15 the first support part (31) and/or the second support part (32) is provided in the bottom (3) of the reaction chamber (1); or the first support part (31) is provided in the at least one side wall (2) and the second support part (32) is provided in the bottom (3) of the reaction chamber (1).
    [13] 13. An apparatus according to claim 11, characterized in that the supporting structure (31, 32) comprises a first support part (31) and a second support part (32), the at least one side wall (2) is arranged to form the first support part 25 (31) and/or the second support part (32); or the bottom (3) of the reaction chamber (1) is arranged to form the first support part (31) and/or the second support part (32); or the at least one side wall (2) and the bottom (3) of the reaction chamber (1) are arranged to form the first support part (31) and the second support part 30 (32).
    [14] 14. An apparatus according to any of claims 3 - 13, characterized in that a first nozzle bearing part (43), the first fixing part (51), the nozzle head (20), the second fixing part (52) and a second nozzle bearing
    35 part (44) are arranged successively along the support axis (S).
    [15] 15. An apparatus according to claim 14, characterized in that along the support axis (S) from the first nozzle bearing part (43) to the second nozzle bearing part (44) there is only one material in the direction perpendicular to the support axis (S).
    [16] 16. An apparatus according to any previous claim, characterized in that the apparatus further comprises a transport cylinder (10) having a cylindrical outer surface (11) and a central axis (C), the output face (24) of the nozzle head (20) is arranged to face toward the cylindrical outer surface
    10 (11) of the transport cylinder (10).
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    同族专利:
    公开号 | 公开日
    WO2019077206A1|2019-04-25|
    FI128453B|2020-05-29|
    引用文献:
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    FI20175920A|FI128453B|2017-10-18|2017-10-18|Apparatus for Processing a Surface of a Substrate|FI20175920A| FI128453B|2017-10-18|2017-10-18|Apparatus for Processing a Surface of a Substrate|
    PCT/FI2018/050758| WO2019077206A1|2017-10-18|2018-10-17|Apparatus|
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